منابع مشابه
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Positive resists form an indene carboxylic acid during exposure making them soluble in aqueous alkaline solutions. Therefore, positive resists develop where they have been exposed, while the unexposed areas remain on the substrate. Since positive resists do not cross-link, the resist structures rounden beyond their softening point of typically 100-130°C. Negative resists such as the AZ® nLOF 20...
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ژورنال
عنوان ژورنال: Nature
سال: 2011
ISSN: 0028-0836,1476-4687
DOI: 10.1038/470313a